The MEMS Laboratory at SJSU has 1300 sq. ft. of space dedicated to research and education
in microfluidics, microelectromechanical systems (MEMS), and soft tissue mechanics.
Special-purpose instruments include a Veeco Wyko NT9100 optical profiler, an Instron
ElectroPuls E1000 dynamic mechanical tester, an Agilent 5500 AFM atomic force microscope,
a Cascade L50 microfluidics test platform, an Olympus IX51 fluorescence inverted microscope,
a Sutter MP-285 nanopositioner, and a Harrick PDC-001 plasma chamber. Other multipurpose
items include programmable syringe and pneumatics hardware, load cells, piezo stage
actuators, and displacement sensors.
