Equipment

Photolithography

  • Quintel Q4000 aligner
  • Quintel Q7000 aligner with backside IR
  • Laurell WS-400 spin coater
  • Laurell WS-650 spin coater
  • Brewer Science CEE spin developer

Plasma Etching

  • March CS-1701 Plasma Etcher

Wet Processing

  • Wet benches
  • Spin rinse dryers

Metal Deposition

  • Denton Explorer 14 sputter deposition system
  • Filament-based thin-film evaporator
  • Crucible-based thin-film evaporator

Thermal Processing

  • Oxidation & diffusion furnace
  • Anneal furnace

Metrology & Testing

  • Signatone semiconductor probe stations
  • HP4145 semiconductor parameter analyzers
  • C-V test station
  • Filmetrics F20-UV reflectometer
  • NanoSpec 210 thin film reflectometers
  • NanoSpec 4000 thin film reflectometer
  • Filmetrics Profilm3D optical profiler
  • Signatone four-point probe