Collage showing 15 examples of work done in the lab.

The Microscale Process Engineering Laboratory is a 5000 sq.ft. facility that supports hands-on instruction and academic research in microfabrication, process engineering, and device testing. The lab hosts a wide variety of courses, projects, and special programs across several engineering disciplines.

About Us

Meet our personnel and learn how to contact us.


Information on our equipment, processes and user access.


View the courses supported by our lab.

Logos of 9 partners including AMD, Cypress, Novellus, OAI, Quintel Corp and SME

This facility is made possible thanks to the generous support of founding partners Applied Materials, Intel Corporation, and the National Science Foundation, as well as several contributing partners across Silicon Valley.