Processes

Listed below are some of the relatively common processes used in the lab, but the list is not exhaustive. Please contact MPEL faculty and staff members regarding other processes.

Photolithography and Spin Processing

• Photolithography (positive, negative, image reversal)
• Spin-on glass

Plasma Etching

• Oxide dry etching
• Photoresist ashing

Wet Processing

• Pre-diffusion cleaning
• Oxide wet etching
• Silicon anisotropic etching
• Metal film wet etching

Vapor Deposition

• Metal evaporation
• DC sputtering

Thermal Processing

• Dry and wet oxidation
• Diffusion
• Annealing