Equipment

Photolithography

• OAI Model 204 mask aligner
• Quintel Q4000 mask aligner
• Laurell WS-400 spin coater
• Laurell WS-650 spin coater
• Brewer Science CEE spin developer

Plasma Etching

• March CS-1701 Plasma Etcher

Wet Processing

• Wet benches
• Spin rinse dryers

Metal Deposition

• Denton Explorer 14 sputter deposition system
• Filament-based thin-film evaporator
• Crucible-based thin-film evaporator

Thermal Processing

• Oxidation & diffusion furnace
• Anneal furnace

Metrology and Testing

• Signatone semiconductor probe stations
• HP4145 semiconductor parameter analyzers
• C-V test station
• Filmetrics F20-UV reflectometer
• NanoSpec 210 thin film reflectometers
• NanoSpec 4000 thin film reflectometer
• Filmetrics Profilm3D optical profiler
• Signatone four-point probe