Facility

Taking Your Project Further

The highly versatile Microscale Process Engineering Laboratory (MPEL) at SJSU is equipped to suit your needs.

Equipment

Take a look at MPEL's current equipment inventory, including mask aligners, plasma etchers, vapor deposition systems, probe stations, reflectometers, and much more.

Processes

View MPEL's list of common processes used in the lab, such as photolithography, plasma etching, vapor deposition, and thermal processing. Please note that this list is not exhaustive and the lab may be capable of doing a variety of other processes.

User Access

If you would like to access our lab, it is very important that you submit a project proposal and a new user registration. Please visit our User Access page for more information.